Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Détermination des facteurs de sensibilité relative à l'aide de matériaux de référence à ions implantés

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.